Detail publikačního výsledku

Early Access Tools - Integration of TCAD Tools and Fabrication

RECMAN, M.

Originální název

Early Access Tools - Integration of TCAD Tools and Fabrication

Anglický název

Early Access Tools - Integration of TCAD Tools and Fabrication

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

To develop a powerful TCAD( Technology CAD ) package the two main problems are to be solved. The first one is to extract device model parameter values from front-end technological parameters. The second problem to be solved is to calibrate TCAD software to specific tools and process modules to give a fast, accurate and reliable method of evaluating and optimizing process conditions without the need to run numerous test wafers. At present the exploitation of the TCAD tools to solve these problems is under study, and it seems to be just the beginning of a path that provides a new realm of highly accurate device performance modeling. The approaches to integrate process, device and circuit simulation TCAD tools are reviewed and examples to solve these problems by leading TCAD vendors are presented.

Anglický abstrakt

To develop a powerful TCAD( Technology CAD ) package the two main problems are to be solved. The first one is to extract device model parameter values from front-end technological parameters. The second problem to be solved is to calibrate TCAD software to specific tools and process modules to give a fast, accurate and reliable method of evaluating and optimizing process conditions without the need to run numerous test wafers. At present the exploitation of the TCAD tools to solve these problems is under study, and it seems to be just the beginning of a path that provides a new realm of highly accurate device performance modeling. The approaches to integrate process, device and circuit simulation TCAD tools are reviewed and examples to solve these problems by leading TCAD vendors are presented.

Klíčová slova

process simulation, device simulation, circuit simulation, computer-aided design, semiconductor devices modeling

Klíčová slova v angličtině

process simulation, device simulation, circuit simulation, computer-aided design, semiconductor devices modeling

Autoři

RECMAN, M.

Vydáno

01.01.2003

Nakladatel

Novotný-Brno

Místo

Brno

ISBN

80-214-2452-4

Kniha

Electronic Devices and Systems 2003 - Proceedings

Strany od

270

Strany počet

6

BibTex

@inproceedings{BUT9408,
  author="Milan {Recman}",
  title="Early Access Tools - Integration of TCAD Tools and Fabrication",
  booktitle="Electronic Devices and Systems 2003 - Proceedings",
  year="2003",
  pages="6",
  publisher="Novotný-Brno",
  address="Brno",
  isbn="80-214-2452-4"
}