Detail publikačního výsledku

Low power MEMS heating membrane

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.

Originální název

Low power MEMS heating membrane

Anglický název

Low power MEMS heating membrane

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.

Anglický abstrakt

This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.

Klíčová slova

MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.

Klíčová slova v angličtině

MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.

Autoři

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.

Rok RIV

2013

Vydáno

28.06.2012

Nakladatel

Vysoké učení technické v Brně

Místo

Brno

ISBN

978-80-214-4539-0

Kniha

EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS

Strany od

257

Strany do

260

Strany počet

4

BibTex

@inproceedings{BUT93610,
  author="Vojtěch {Svatoš} and Marian {Márik} and Jan {Pekárek} and Radim {Hrdý} and Jana {Pekárková} and Jaromír {Hubálek}",
  title="Low power MEMS heating membrane",
  booktitle="EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS",
  year="2012",
  number="1",
  pages="257--260",
  publisher="Vysoké učení technické v Brně",
  address="Brno",
  isbn="978-80-214-4539-0"
}