Detail publikačního výsledku

Characterization of Nonlinear Integrated Capacitors

SUTORÝ, T.; KOLKA, Z.

Originální název

Characterization of Nonlinear Integrated Capacitors

Anglický název

Characterization of Nonlinear Integrated Capacitors

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

The paper deals with a modified CBCM (Charge-Based Capacitance Measurements) method for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in the 0.35 um CMOS process. Verification against known capacitances proved the correctness and accuracy of the method. It was successfully used for MOSCAPs characterization.

Anglický abstrakt

The paper deals with a modified CBCM (Charge-Based Capacitance Measurements) method for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in the 0.35 um CMOS process. Verification against known capacitances proved the correctness and accuracy of the method. It was successfully used for MOSCAPs characterization.

Klíčová slova

Charge-based capacitance measurements, test structures, MOS capacitors, integrated circuits.

Klíčová slova v angličtině

Charge-based capacitance measurements, test structures, MOS capacitors, integrated circuits.

Autoři

SUTORÝ, T.; KOLKA, Z.

Rok RIV

2010

Vydáno

01.12.2008

ISSN

1210-2512

Periodikum

Radioengineering

Svazek

17

Číslo

4

Stát

Česká republika

Strany od

9

Strany do

14

Strany počet

6

BibTex

@article{BUT48041,
  author="Tomáš {Sutorý} and Zdeněk {Kolka}",
  title="Characterization of Nonlinear Integrated Capacitors",
  journal="Radioengineering",
  year="2008",
  volume="17",
  number="4",
  pages="9--14",
  issn="1210-2512"
}