Detail publikačního výsledku

Micro-Electro-Mechanical Systems (MEMS)

FICEK, R.; VRBA, R.

Originální název

Micro-Electro-Mechanical Systems (MEMS)

Anglický název

Micro-Electro-Mechanical Systems (MEMS)

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors are made of the two parts; elastic electrodesensing film fabricated by anisotropic etching and solid electrode. The emission sensor has elastic anode electrode with membrane and carbon nanotubes (MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.

Anglický abstrakt

In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors are made of the two parts; elastic electrodesensing film fabricated by anisotropic etching and solid electrode. The emission sensor has elastic anode electrode with membrane and carbon nanotubes (MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.

Klíčová slova

carbon nanotubes, emission, pressure sensor

Klíčová slova v angličtině

carbon nanotubes, emission, pressure sensor

Autoři

FICEK, R.; VRBA, R.

Vydáno

04.09.2007

Nakladatel

Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105

Místo

Brno

ISBN

978-80-214-3535-3

Kniha

Moderní metody řešení, návrhu a aplikace elektronických obvodů

Strany od

48

Strany do

51

Strany počet

4

BibTex

@inproceedings{BUT28141,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Micro-Electro-Mechanical Systems (MEMS)",
  booktitle="Moderní metody řešení, návrhu a aplikace elektronických obvodů",
  year="2007",
  number="první",
  pages="48--51",
  publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  address="Brno",
  isbn="978-80-214-3535-3"
}