Detail publikačního výsledku

Optimization of secondary electron detection by segmental ionization detector in environmental SEM

Černoch, P., Jirák, J.

Originální název

Optimization of secondary electron detection by segmental ionization detector in environmental SEM

Anglický název

Optimization of secondary electron detection by segmental ionization detector in environmental SEM

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement. The segmental ionization detector optimized for true secondary electron detection is in the main focus.

Anglický abstrakt

The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement. The segmental ionization detector optimized for true secondary electron detection is in the main focus.

Klíčová slova

Environmental scanning electron microscope, secondary electrons, segmental ionization detector.

Klíčová slova v angličtině

Environmental scanning electron microscope, secondary electrons, segmental ionization detector.

Autoři

Černoch, P., Jirák, J.

Vydáno

01.01.2007

Nakladatel

Czechoslovak Microscopy Society

ISBN

978-80-239-9397-4

Kniha

Proceedings of the 8th Multinational Congress on Microscopy

Strany od

79

Strany počet

2

BibTex

@inproceedings{BUT23831,
  author="Pavel {Černoch} and Josef {Jirák}",
  title="Optimization of secondary electron detection by segmental ionization detector in environmental SEM",
  booktitle="Proceedings of the 8th Multinational Congress on Microscopy",
  year="2007",
  number="1",
  pages="2",
  publisher="Czechoslovak Microscopy Society",
  isbn="978-80-239-9397-4"
}