Detail publikačního výsledku

Metal thin films in sulfur hexafluoride decomposition products

VRBICKÝ, J.

Originální název

Metal thin films in sulfur hexafluoride decomposition products

Anglický název

Metal thin films in sulfur hexafluoride decomposition products

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

This article describes conductivity of metal thin films dependence on concentration of sulfur hexafluoride decomposition products. The sulfur hexafluoride was decomposed by electrical sparks.

Anglický abstrakt

This article describes conductivity of metal thin films dependence on concentration of sulfur hexafluoride decomposition products. The sulfur hexafluoride was decomposed by electrical sparks.

Klíčová slova

Sulfur hexafluoride, thin film coating, decomposition products

Klíčová slova v angličtině

Sulfur hexafluoride, thin film coating, decomposition products

Autoři

VRBICKÝ, J.

Vydáno

29.01.2007

Nakladatel

Brno University of Technology, Faculty of Elactrical Engineering and Communication

Místo

Brno

ISBN

978-80-214-3410-3

Kniha

Student EEICT 2007

Strany od

131

Strany do

133

Strany počet

3

BibTex

@inproceedings{BUT23157,
  author="Jiří {Vrbický}",
  title="Metal thin films in sulfur hexafluoride decomposition products",
  booktitle="Student EEICT 2007",
  year="2007",
  number="1",
  pages="131--133",
  publisher="Brno University of Technology, Faculty of Elactrical Engineering and Communication",
  address="Brno",
  isbn="978-80-214-3410-3"
}