Detail publikačního výsledku

Collection Efficiency of the Detector of Secondary Electrons in SEM.

KONVALINA, I., MÜLLEROVÁ, I.

Originální název

Collection Efficiency of the Detector of Secondary Electrons in SEM.

Anglický název

Collection Efficiency of the Detector of Secondary Electrons in SEM.

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

In order to collect the secondary electrons (SE), scanning electron microscopes (SEM) are equipped with the Everhart-Thornley (ET) type detector. The electrostatic field of the front grid, biased to a positive potential of several hundred volts , is to attract all SE of kinetic energy below 50 eV or at least those from the SE spectrum peak at 1¸3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one, which is mainly given by their low collection efficiency. The electrostatic field of the grid cannot sufficiently penetrate toward the specimen and influence the trajectories of SE owing to grounded electrodes surrounding the specimen (specimen alone and its holder, specimen stage, pole piece of the objective lens, etc).

Anglický abstrakt

In order to collect the secondary electrons (SE), scanning electron microscopes (SEM) are equipped with the Everhart-Thornley (ET) type detector. The electrostatic field of the front grid, biased to a positive potential of several hundred volts , is to attract all SE of kinetic energy below 50 eV or at least those from the SE spectrum peak at 1¸3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one, which is mainly given by their low collection efficiency. The electrostatic field of the grid cannot sufficiently penetrate toward the specimen and influence the trajectories of SE owing to grounded electrodes surrounding the specimen (specimen alone and its holder, specimen stage, pole piece of the objective lens, etc).

Klíčová slova

collection efficiency, ET detector, secondary electrons

Klíčová slova v angličtině

collection efficiency, ET detector, secondary electrons

Autoři

KONVALINA, I., MÜLLEROVÁ, I.

Vydáno

12.07.2004

Místo

Brno

ISBN

80-239-3246-2

Kniha

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Strany od

41

Strany počet

2

BibTex

@inproceedings{BUT21740,
  author="Ivo {Konvalina} and Ilona {Müllerová}",
  title="Collection Efficiency of the Detector of Secondary Electrons in SEM.",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2004",
  pages="2",
  address="Brno",
  isbn="80-239-3246-2"
}