Detail publikačního výsledku

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

NOVÁČEK, Z.; ZEZULKA, L.; KONEČNÝ, M.; PALOUDA, A.; VACEK, M.; KOLOMÝ, Š.; SPOUSTA, J.; SUPALOVÁ, L.; ČERNEK, O.; SPOUSTA, J.; ŠIKOLA, T.

Originální název

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

Anglický název

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

Druh

Článek WoS

Originální abstrakt

A hand-operated micromanipulator extending the capabilities of high-vacuum scanning electron microscopes (SEMs) with optical measurement modes, electrical contacting of structures, and mechanical manipulation was developed. This micromanipulator supports combined four degrees of freedom rotational and sliding movements, achieving positioning accuracy and repeatability to the center of the SEM view-field within the requested ten micrometers. It integrates a manipulator probe or optical fiber that can be easily maneuvered over the sample area inside the SEM chamber. These enable various unique applications, including mechanical manipulation, local electrical probing, cathodoluminescence measurements, local gas injection via photonic crystal optical fiber (PCF), and local thin film heating and evaporation, respectively. Thus, the seamlessly integrated in-house-built micromanipulator facilitates real-time observation and modification of micro- and nanostructures with high precision and versatility, expanding the capabilities of conventional SEMs.

Anglický abstrakt

A hand-operated micromanipulator extending the capabilities of high-vacuum scanning electron microscopes (SEMs) with optical measurement modes, electrical contacting of structures, and mechanical manipulation was developed. This micromanipulator supports combined four degrees of freedom rotational and sliding movements, achieving positioning accuracy and repeatability to the center of the SEM view-field within the requested ten micrometers. It integrates a manipulator probe or optical fiber that can be easily maneuvered over the sample area inside the SEM chamber. These enable various unique applications, including mechanical manipulation, local electrical probing, cathodoluminescence measurements, local gas injection via photonic crystal optical fiber (PCF), and local thin film heating and evaporation, respectively. Thus, the seamlessly integrated in-house-built micromanipulator facilitates real-time observation and modification of micro- and nanostructures with high precision and versatility, expanding the capabilities of conventional SEMs.

Klíčová slova

Micromanipulator; Scanning electron microscopy; Optical fiber; Cathodoluminescence; Direct laser lithography

Klíčová slova v angličtině

Micromanipulator; Scanning electron microscopy; Optical fiber; Cathodoluminescence; Direct laser lithography

Autoři

NOVÁČEK, Z.; ZEZULKA, L.; KONEČNÝ, M.; PALOUDA, A.; VACEK, M.; KOLOMÝ, Š.; SPOUSTA, J.; SUPALOVÁ, L.; ČERNEK, O.; SPOUSTA, J.; ŠIKOLA, T.

Vydáno

01.08.2025

Nakladatel

PERGAMON-ELSEVIER SCIENCE LTD

Místo

OXFORD

ISSN

1879-2715

Periodikum

Vacuum

Svazek

238

Číslo

114290

Stát

Spojené království Velké Británie a Severního Irska

Strany počet

8

URL

https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub

BibTex

@article{BUT198114,
  author="Zdeněk {Nováček} and Lukáš {Zezulka} and Martin {Konečný} and Adam {Palouda} and Martin {Vacek} and Štěpán {Kolomý} and Jiří {Spousta} and Linda {Supalová} and Ondrej {Černek} and Jiří {Spousta} and Tomáš {Šikola}",
  title="Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool",
  journal="Vacuum",
  year="2025",
  volume="238",
  number="114290",
  pages="8",
  doi="10.1016/j.vacuum.2025.114290",
  issn="0042-207X",
  url="https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub"
}