Detail publikačního výsledku

Tips chip measuring unit

Pavlík M., Magát M., Vrba R.

Originální název

Tips chip measuring unit

Anglický název

Tips chip measuring unit

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.

Anglický abstrakt

This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.

Klíčová slova

tip, chip, measurement

Klíčová slova v angličtině

tip, chip, measurement

Autoři

Pavlík M., Magát M., Vrba R.

Vydáno

14.09.2006

Nakladatel

Vysoké učení technické v Brně, Antonínská 548/1

Místo

Brno

ISBN

80-214-3246-2

Kniha

EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS

Strany od

254

Strany počet

4

BibTex

@inproceedings{BUT18812,
  author="Michal {Pavlík} and Martin {Magát} and Radimír {Vrba}",
  title="Tips chip measuring unit",
  booktitle="EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS",
  year="2006",
  number="1",
  pages="4",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  address="Brno",
  isbn="80-214-3246-2"
}