Detail publikačního výsledku

Analysis of impact of conic aperture in differentially pumped chamber

MAXA, J.; ŠABACKÁ, P.; VYROUBAL, P.

Originální název

Analysis of impact of conic aperture in differentially pumped chamber

Anglický název

Analysis of impact of conic aperture in differentially pumped chamber

Druh

Článek Scopus

Originální abstrakt

The paper focuses on the simulation of medium dynamics in the environmental scanning electron microscope. In particular, the paper examines the conical aperture location effect in the differentially pumped chamber and the width of the pumping channel in this chamber. The solution is based on the Taylor-Maccoll theory about the impact of the shock wave and was obtained by the use of continuum and finite volume methods in the ANSYS Fluent system.

Anglický abstrakt

The paper focuses on the simulation of medium dynamics in the environmental scanning electron microscope. In particular, the paper examines the conical aperture location effect in the differentially pumped chamber and the width of the pumping channel in this chamber. The solution is based on the Taylor-Maccoll theory about the impact of the shock wave and was obtained by the use of continuum and finite volume methods in the ANSYS Fluent system.

Klíčová slova

ANSYS Fluent; Differentially pumped chamber; Environmental scanning electron microscope (ESEM); Finite volume method; Taylor-Maccoll theory

Klíčová slova v angličtině

ANSYS Fluent; Differentially pumped chamber; Environmental scanning electron microscope (ESEM); Finite volume method; Taylor-Maccoll theory

Autoři

MAXA, J.; ŠABACKÁ, P.; VYROUBAL, P.

Rok RIV

2023

Vydáno

01.01.2019

Nakladatel

University of Defence

Místo

Brno

ISSN

1802-2308

Periodikum

Advances in Military Technology

Svazek

14

Číslo

1

Stát

Česká republika

Strany od

151

Strany do

161

Strany počet

11

URL

https://www.unob.cz/fvt/vyzkum_vyvoj/Stranky/aimt/aimt.aspx

BibTex

@article{BUT177389,
  author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Analysis of impact of conic aperture in differentially pumped chamber",
  journal="Advances in Military Technology",
  year="2019",
  volume="14",
  number="1",
  pages="151--161",
  doi="10.3849/aimt.01268",
  issn="1802-2308",
  url="https://www.unob.cz/fvt/vyzkum_vyvoj/Stranky/aimt/aimt.aspx"
}