Detail publikačního výsledku

Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

RYGER, I., LOBOTKA, P., STEIGER, A., CHROMIK, S., LALIANSKY, T., RAIDA, Z., PITRA, K., ZEHETNER, J., SPANKOVA, M., GAZI, S., SOJKOVA, M. VANGO, G.

Originální název

Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

Anglický název

Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

Druh

Článek WoS

Originální abstrakt

In this contribution, we describe the design, technology, and physical parameters of antenna-coupled microbolometer, used for broadband detection of terahertz electromagnetic spectrum. This microbolometer features an application of La0.67Sr0.33MnO3 layer grown on multilayered material stack ensuring lattice matching of the sensing LSMO layer to silicon. By virtue of bulk micromachining of silicon-on-insulator substrates, the sensing structure is built on thin suspended membrane to provide weak thermal link, increasing thermal response, thus sensitivity. Additionally, it helps suppressing excitation of in-plane guided surface modes that will otherwise deteriorate the antenna radiation diagram and affect the spectral responsivity of the sensor. Finally, the operation of sensor is demonstrated using a molecular laser setup at 762 GHz (and also 1.4 THz) emission line. The parameters of the said microbolometers are analyzed in terms of response and time constant. Optimal working temperature of the detectors is about 65 degrees C.

Anglický abstrakt

In this contribution, we describe the design, technology, and physical parameters of antenna-coupled microbolometer, used for broadband detection of terahertz electromagnetic spectrum. This microbolometer features an application of La0.67Sr0.33MnO3 layer grown on multilayered material stack ensuring lattice matching of the sensing LSMO layer to silicon. By virtue of bulk micromachining of silicon-on-insulator substrates, the sensing structure is built on thin suspended membrane to provide weak thermal link, increasing thermal response, thus sensitivity. Additionally, it helps suppressing excitation of in-plane guided surface modes that will otherwise deteriorate the antenna radiation diagram and affect the spectral responsivity of the sensor. Finally, the operation of sensor is demonstrated using a molecular laser setup at 762 GHz (and also 1.4 THz) emission line. The parameters of the said microbolometers are analyzed in terms of response and time constant. Optimal working temperature of the detectors is about 65 degrees C.

Klíčová slova

Microbolometer; Terahertz radiation; Log-periodic antenna; Micromachining; LSMO; Membrane

Klíčová slova v angličtině

Microbolometer; Terahertz radiation; Log-periodic antenna; Micromachining; LSMO; Membrane

Autoři

RYGER, I., LOBOTKA, P., STEIGER, A., CHROMIK, S., LALIANSKY, T., RAIDA, Z., PITRA, K., ZEHETNER, J., SPANKOVA, M., GAZI, S., SOJKOVA, M. VANGO, G.

Rok RIV

2022

Vydáno

31.03.2021

Nakladatel

SPRINGER

Místo

NEW YORK

ISSN

1866-6892

Periodikum

Journal of Infrared Millimeter and Terahertz Waves

Svazek

42

Číslo

4

Stát

Spojené státy americké

Strany od

462

Strany do

478

Strany počet

17

URL

https://link.springer.com/article/10.1007/s10762-021-00781-y

BibTex

@article{BUT175706,
  author="Zbyněk {Raida}",
  title="Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation",
  journal="Journal of Infrared Millimeter and Terahertz Waves",
  year="2021",
  volume="42",
  number="4",
  pages="462--478",
  doi="10.1007/s10762-021-00781-y",
  issn="1866-6892",
  url="https://link.springer.com/article/10.1007/s10762-021-00781-y"
}