Detail publikačního výsledku

Modeling Electrostatic MEMS Actuator

KOLKA, Z.; BIOLKOVÁ, V.; BIOLEK, D.; BIOLEK, Z.

Originální název

Modeling Electrostatic MEMS Actuator

Anglický název

Modeling Electrostatic MEMS Actuator

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

Anglický abstrakt

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

Klíčová slova

MEMS, electrostatic actuator, micromirror, memcapacitor, state equation, modeling, simulation, pinched hysteresis

Klíčová slova v angličtině

MEMS, electrostatic actuator, micromirror, memcapacitor, state equation, modeling, simulation, pinched hysteresis

Autoři

KOLKA, Z.; BIOLKOVÁ, V.; BIOLEK, D.; BIOLEK, Z.

Rok RIV

2022

Vydáno

28.11.2021

Nakladatel

IEEE

Místo

Dubai, UAE

ISBN

978-1-7281-8281-0

Kniha

2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Proceedings

Strany od

1

Strany do

5

Strany počet

5

BibTex

@inproceedings{BUT175569,
  author="Zdeněk {Kolka} and Viera {Biolková} and Dalibor {Biolek} and Zdeněk {Biolek}",
  title="Modeling Electrostatic MEMS Actuator",
  booktitle="2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Proceedings",
  year="2021",
  pages="1--5",
  publisher="IEEE",
  address="Dubai, UAE",
  isbn="978-1-7281-8281-0"
}