Přístupnostní navigace
E-přihláška
Vyhledávání Vyhledat Zavřít
Detail publikačního výsledku
SKALSKÝ, M.; FIALKA, J.; HAVRÁNEK, Z.
Originální název
Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization
Anglický název
Druh
Stať ve sborníku v databázi WoS či Scopus
Originální abstrakt
An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning.
Anglický abstrakt
Klíčová slova
laser scanning interferometry, double-beam, phase compensation
Klíčová slova v angličtině
Autoři
Rok RIV
2020
Vydáno
20.05.2019
Nakladatel
IEEE
Místo
Piscataway; USA
ISBN
978-1-5386-3460-8
Kniha
2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2019) Proceedings
Edice
CFP19IMT-ART
Strany od
466
Strany do
471
Strany počet
6
URL
https://ieeexplore.ieee.org/abstract/document/8826963
BibTex
@inproceedings{BUT158395, author="Michal {Skalský} and Jiří {Fialka} and Zdeněk {Havránek}", title="Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization", booktitle="2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2019) Proceedings", year="2019", series="CFP19IMT-ART", pages="466--471", publisher="IEEE", address="Piscataway; USA", doi="10.1109/I2MTC.2019.8826963", isbn="978-1-5386-3460-8", url="https://ieeexplore.ieee.org/abstract/document/8826963" }