Detail publikačního výsledku

Modelling of Magnetron TiN Deposition Using the Design of Experiment

ZAHRADNÍČEK, R.; MOURALOVÁ, K.; PROKEŠ, T.; HRABEC, P.; BEDNÁŘ, J.

Originální název

Modelling of Magnetron TiN Deposition Using the Design of Experiment

Anglický název

Modelling of Magnetron TiN Deposition Using the Design of Experiment

Druh

Kapitola, resp. kapitoly v odborné knize

Originální abstrakt

The aim of this study was to find the optimal settings of magnetron sputtering deposition of thin titanium nitride layers with respect to the size and hardness of the deposited layer. Direct sputtering deposition of the ceramic target using a radiofrequency source was used for magnetron sputtering deposition. The advantage of this method is easier finding of optimal deposition parameters. X-ray reflectometry was used to characterize the coating in terms of thickness. The hardness was determined by the Berkovich tip. To optimize the thickness and hardness of the TiN coating, a rotatable central composite design of response area for pressure and performance was used. Using only statistically significant fac-tors, mathematical models of thickness and hardness of TiN coating were con-structed. Based on these mathematical models, the optimal settings of statistically significant TiN magnetron deposition factors were found.

Anglický abstrakt

The aim of this study was to find the optimal settings of magnetron sputtering deposition of thin titanium nitride layers with respect to the size and hardness of the deposited layer. Direct sputtering deposition of the ceramic target using a radiofrequency source was used for magnetron sputtering deposition. The advantage of this method is easier finding of optimal deposition parameters. X-ray reflectometry was used to characterize the coating in terms of thickness. The hardness was determined by the Berkovich tip. To optimize the thickness and hardness of the TiN coating, a rotatable central composite design of response area for pressure and performance was used. Using only statistically significant fac-tors, mathematical models of thickness and hardness of TiN coating were con-structed. Based on these mathematical models, the optimal settings of statistically significant TiN magnetron deposition factors were found.

Klíčová slova

TiN, Magnetron deposition, XRR, Hardness, Design of experiment

Klíčová slova v angličtině

TiN, Magnetron deposition, XRR, Hardness, Design of experiment

Autoři

ZAHRADNÍČEK, R.; MOURALOVÁ, K.; PROKEŠ, T.; HRABEC, P.; BEDNÁŘ, J.

Rok RIV

2021

Vydáno

11.03.2021

Nakladatel

Springer

Místo

Švýcarsko

ISBN

978-3-030-61659-5

Kniha

Recent Advances in Soft Computing and Cybernetics

ISSN

1434-9922

Periodikum

Studies in Fuzziness and Soft Computing

Svazek

2019

Číslo

1

Stát

neuvedeno

Strany od

63

Strany do

70

Strany počet

8

URL

https://link.springer.com/chapter/10.1007/978-3-030-61659-5_6

BibTex

@inbook{BUT157678,
  author="Radim {Zahradníček} and Kateřina {Mouralová} and Tomáš {Prokeš} and Pavel {Hrabec} and Josef {Bednář}",
  title="Modelling of Magnetron TiN Deposition Using the Design of Experiment",
  booktitle="Recent Advances in Soft Computing and Cybernetics",
  year="2021",
  publisher="Springer",
  address="Švýcarsko",
  pages="63--70",
  doi="10.1007/978-3-030-61659-5\{_}6",
  isbn="978-3-030-61659-5",
  url="https://link.springer.com/chapter/10.1007/978-3-030-61659-5_6"
}