Detail publikačního výsledku

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; BEHZADI, S.; JONES, F.

Originální název

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

Anglický název

Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.

Anglický abstrakt

Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.

Klíčová slova

Nanoindentation, Ellipsometry, PACVD, Plasma polymer

Klíčová slova v angličtině

Nanoindentation, Ellipsometry, PACVD, Plasma polymer

Autoři

PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; BEHZADI, S.; JONES, F.

Vydáno

11.03.2005

Nakladatel

Elsevier

Místo

Germany

Kniha

Proceedings of Ninth International Conference on Plasma surface engineering

Edice

2004

Strany od

468

Strany do

471

Strany počet

4

BibTex

@inproceedings{BUT15157,
  author="Radek {Přikryl} and Vladimír {Čech} and Lenka {Zajíčková} and Jan {Vaněk} and Shasa {Behzadi} and Frank {Jones}",
  title="Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane",
  booktitle="Proceedings of Ninth International Conference on Plasma surface engineering",
  year="2005",
  series="2004",
  pages="468--471",
  publisher="Elsevier",
  address="Germany"
}