Detail publikačního výsledku

Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.

MAXA, J.; HLAVATÁ, P.; VYROUBAL, P.

Originální název

Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.

Anglický název

Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

The article is focused on the medium dynamics simulation in the environmental scanning electron microscope. Specifically, it researches (examines) the conical aperture location effect in the differential pumped chamber and the width of the pumping channel in this chamber. The problem was solved in the Ansys Fluent system using mechanism of continuum and finite volume method. The problem is solved according to the Taylor – Maccoll theory about the impact of the shock wave.

Anglický abstrakt

The article is focused on the medium dynamics simulation in the environmental scanning electron microscope. Specifically, it researches (examines) the conical aperture location effect in the differential pumped chamber and the width of the pumping channel in this chamber. The problem was solved in the Ansys Fluent system using mechanism of continuum and finite volume method. The problem is solved according to the Taylor – Maccoll theory about the impact of the shock wave.

Klíčová slova

Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.

Klíčová slova v angličtině

Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.

Autoři

MAXA, J.; HLAVATÁ, P.; VYROUBAL, P.

Rok RIV

2019

Vydáno

26.10.2018

Nakladatel

University of Defence

Místo

Brno

ISSN

1802-2308

Periodikum

Advances in Military Technology

Číslo

1

Stát

Česká republika

Strany od

50

Strany do

61

Strany počet

12

BibTex

@article{BUT150566,
  author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.",
  journal="Advances in Military Technology",
  year="2018",
  number="1",
  pages="50--61",
  issn="1802-2308"
}