Detail publikačního výsledku

Electron Cyclotron Resonance Plasma and Ion Sources Design and Use

BOUŠEK, J.

Originální název

Electron Cyclotron Resonance Plasma and Ion Sources Design and Use

Anglický název

Electron Cyclotron Resonance Plasma and Ion Sources Design and Use

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Various configurations of Electron Cyclotrone Resonance (ECR) plasma reactors were reported recently for emerging new applications as nanotubes, nanorods, nanobells and field emission devices. Basic principles of ECR plasma generation and the most important features are here discussed. A simple ECR plasma and ion source design is described and examples of some parameter dependences are given.

Anglický abstrakt

Various configurations of Electron Cyclotrone Resonance (ECR) plasma reactors were reported recently for emerging new applications as nanotubes, nanorods, nanobells and field emission devices. Basic principles of ECR plasma generation and the most important features are here discussed. A simple ECR plasma and ion source design is described and examples of some parameter dependences are given.

Klíčová slova v angličtině

Electron Cyclotrone Resonance, plasma reactor, plasma density, electron energy, chemical vapor deposition

Autoři

BOUŠEK, J.

Vydáno

09.09.2004

Nakladatel

Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105

Místo

Brno

ISBN

80-214-2701-9

Kniha

Electronic Devices and Systems 2004. Proceedings.

Strany od

251

Strany počet

4

BibTex

@inproceedings{BUT12994,
  author="Jaroslav {Boušek}",
  title="Electron Cyclotron Resonance Plasma and Ion Sources Design and Use",
  booktitle="Electronic Devices and Systems 2004. Proceedings.",
  year="2004",
  pages="4",
  publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  address="Brno",
  isbn="80-214-2701-9"
}