Detail publikačního výsledku

Nanostructures Fabrication using Self-Ordering Techniques

HUBÁLEK, J.

Originální název

Nanostructures Fabrication using Self-Ordering Techniques

Anglický název

Nanostructures Fabrication using Self-Ordering Techniques

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Anglický abstrakt

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Klíčová slova

Self-ordering, nanopores, nanorods, nanowires

Klíčová slova v angličtině

Self-ordering, nanopores, nanorods, nanowires

Autoři

HUBÁLEK, J.

Vydáno

09.09.2004

Nakladatel

Ing. Zdeněk Novotný, CSc.

Místo

Brno

ISBN

80-214-2701-9

Kniha

The 11th Electronic Devices and Systems

Svazek

11

Strany od

260

Strany počet

5

BibTex

@inproceedings{BUT11425,
  author="Jaromír {Hubálek}",
  title="Nanostructures Fabrication using Self-Ordering Techniques",
  booktitle="The 11th Electronic Devices and Systems",
  year="2004",
  volume="11",
  number="první",
  pages="5",
  publisher="Ing. Zdeněk Novotný, CSc.",
  address="Brno",
  isbn="80-214-2701-9"
}