Detail publikačního výsledku

Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

KLAPETEK, P.; VALTR, M.; MARTINEK, J.

Originální název

Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

Anglický název

Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

Druh

Článek WoS

Originální abstrakt

We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described.

Anglický abstrakt

We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described.

Klíčová slova

scanning probe microscopy, high-speed SPM, metrology

Klíčová slova v angličtině

scanning probe microscopy, high-speed SPM, metrology

Autoři

KLAPETEK, P.; VALTR, M.; MARTINEK, J.

Rok RIV

2016

Vydáno

20.01.2015

ISSN

0957-4484

Periodikum

NANOTECHNOLOGY

Svazek

26

Číslo

6

Stát

Spojené království Velké Británie a Severního Irska

Strany od

1

Strany do

10

Strany počet

10

BibTex

@article{BUT112268,
  author="Petr {Klapetek} and Miroslav {Valtr} and Jan {Martinek}",
  title="Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system",
  journal="NANOTECHNOLOGY",
  year="2015",
  volume="26",
  number="6",
  pages="1--10",
  doi="10.1088/0957-4484/26/6/065501",
  issn="0957-4484"
}