Detail publikačního výsledku

Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy

MARTINEK, J.; KLAPETEK, P.; CIMRMAN, R.; VALTR, M.

Originální název

Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy

Anglický název

Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy

Druh

Článek WoS

Originální abstrakt

Scanning thermal microscopy (SThM) is a scanning probe microscopy technique for mapping temperature and thermal properties of solid surfaces with very high resolution. Absolute determination of thermal conductivity using SThM, however, is still problematic due to the complex nature of the heat exchange between the probe and sample. In this paper we present a method for thin film thermal conductivity determination based on the use of thin film defects - delaminations by simulation of the measurement process using finite element method.

Anglický abstrakt

Scanning thermal microscopy (SThM) is a scanning probe microscopy technique for mapping temperature and thermal properties of solid surfaces with very high resolution. Absolute determination of thermal conductivity using SThM, however, is still problematic due to the complex nature of the heat exchange between the probe and sample. In this paper we present a method for thin film thermal conductivity determination based on the use of thin film defects - delaminations by simulation of the measurement process using finite element method.

Klíčová slova

Scanning thermal microscopy, thin films, thermal conductivity

Klíčová slova v angličtině

Scanning thermal microscopy, thin films, thermal conductivity

Autoři

MARTINEK, J.; KLAPETEK, P.; CIMRMAN, R.; VALTR, M.

Rok RIV

2015

Vydáno

05.03.2014

ISSN

0957-0233

Periodikum

MEASUREMENT SCIENCE and TECHNOLOGY

Svazek

25

Číslo

4

Stát

Spojené království Velké Británie a Severního Irska

Strany od

1

Strany do

12

Strany počet

12

BibTex

@article{BUT112003,
  author="Jan {Martinek} and Petr {Klapetek} and Robert {Cimrman} and Miroslav {Valtr}",
  title="Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy",
  journal="MEASUREMENT SCIENCE and TECHNOLOGY",
  year="2014",
  volume="25",
  number="4",
  pages="1--12",
  doi="10.1088/0957-0233/25/4/044022",
  issn="0957-0233"
}