Detail publikačního výsledku

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

MOZALEV, A.; BENDOVA, M.; HRDY, R.; PYTLICEK, Z.; HUBALEK, J.

Originální název

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

Anglický název

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

Druh

Konferenční sborník (ne stať)

Originální abstrakt

In this work electrochemical anodizing has been employed to synthesize, for the first time, a three-dimensional nanostructured column-like metal-oxide semiconductor film in which a change in the conductivity along the columns, assembled between the two parallel metal electrodes, is the controlling factor during chemisorption reactions when a gas penetrates such a film. To demonstrate the technology capability, several types of unique niobium-oxide-nanocolumn arrays have been synthesized via multistep anodic processing of an Al/Nb thin-film bilayer sputter-deposited onto oxidized Si substrates and additionally tailoring their parameters by combining chemical dissolution and high-temperature annealing. The films formation-structure-property relationship has been studied in pursuit of altering the film properties and discovering new functionalities for potential application to advanced micro and nanosensors

Anglický abstrakt

In this work electrochemical anodizing has been employed to synthesize, for the first time, a three-dimensional nanostructured column-like metal-oxide semiconductor film in which a change in the conductivity along the columns, assembled between the two parallel metal electrodes, is the controlling factor during chemisorption reactions when a gas penetrates such a film. To demonstrate the technology capability, several types of unique niobium-oxide-nanocolumn arrays have been synthesized via multistep anodic processing of an Al/Nb thin-film bilayer sputter-deposited onto oxidized Si substrates and additionally tailoring their parameters by combining chemical dissolution and high-temperature annealing. The films formation-structure-property relationship has been studied in pursuit of altering the film properties and discovering new functionalities for potential application to advanced micro and nanosensors

Klíčová slova

3-D nanostructures, self-organized film, electrochemical anodizing, anodic oxide films, porous anodic alumina, niobium oxide, functional properties, gas sensor

Klíčová slova v angličtině

3-D nanostructures, self-organized film, electrochemical anodizing, anodic oxide films, porous anodic alumina, niobium oxide, functional properties, gas sensor

Autoři

MOZALEV, A.; BENDOVA, M.; HRDY, R.; PYTLICEK, Z.; HUBALEK, J.

Rok RIV

2014

Vydáno

02.05.2013

Místo

University of Žilina, Slovakia

ISBN

978-80-554-0689-3

Kniha

Proceedings of the International Conference on Advances in Electronic and Photonic Technologies

Edice

D. Pudiš

Strany od

7

Strany do

10

Strany počet

4

BibTex

@proceedings{BUT100920,
  editor="Alexander {Mozalev} and Mária {Bendová} and Radim {Hrdý} and Zdeněk {Pytlíček} and Jaromír {Hubálek}",
  title="The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications",
  year="2013",
  series="D. Pudiš",
  pages="7--10",
  address="University of Žilina, Slovakia",
  isbn="978-80-554-0689-3"
}