Detail publikačního výsledku

Determination of mechanical properties from microcompression test

TRUHLÁŘ, M.; KRUML, T.; KUBĚNA, I.; PETRÁČKOVÁ, K.; NÁHLÍK, L.

Originální název

Determination of mechanical properties from microcompression test

Anglický název

Determination of mechanical properties from microcompression test

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 microns and their height was about 2 microns (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.

Anglický abstrakt

This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 microns and their height was about 2 microns (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.

Klíčová slova

mechanical properties, thin layers, microcompression test

Klíčová slova v angličtině

mechanical properties, thin layers, microcompression test

Autoři

TRUHLÁŘ, M.; KRUML, T.; KUBĚNA, I.; PETRÁČKOVÁ, K.; NÁHLÍK, L.

Rok RIV

2013

Vydáno

14.05.2012

ISBN

978-80-86246-40-6

Kniha

Sborník Engineering Mechanics 2012

Strany od

1435

Strany do

1440

Strany počet

6

BibTex

@inproceedings{BUT97155,
  author="Michal {Truhlář} and Tomáš {Kruml} and Ivo {Kuběna} and Klára {Petráčková} and Luboš {Náhlík}",
  title="Determination of mechanical properties from microcompression test",
  booktitle="Sborník Engineering Mechanics 2012",
  year="2012",
  pages="1435--1440",
  isbn="978-80-86246-40-6"
}