Electrolytic bath for anodic and cathodic processing of metal and oxide layers on dielectric, semiconducting and metallic substrates

Electrolytic bath for anodic and cathodic processing of metal and oxide layers on dielectric, semiconducting and metallic substrates

Funkční vzorek

The device is designed as a cylindrical type electrolytic cell (bath) made of polytetrafluoroethylene (PTFE) consisting of two major components: the upper part to be filled with a liquid electrolyte and the bottom part for holding sample to be processed. The samples are pieces of silicon wafers with metal or oxide layers on top. For being processed, the samples are individually introduced in the device, were they are pressed from the face sides by a PTFE ring of the upper cell part, so that a circular area of the face side of the sample, 3-20 mm in diameter, is in contact with anodizing solution while the back wafer side is fully isolated from the treatment. AutoCAD-made drawings of cell's parts and assembly drawings of the whole device are available.

The device is designed as a cylindrical type electrolytic cell (bath) made of polytetrafluoroethylene (PTFE) consisting of two major components: the upper part to be filled with a liquid electrolyte and the bottom part for holding sample to be processed. The samples are pieces of silicon wafers with metal or oxide layers on top. For being processed, the samples are individually introduced in the device, were they are pressed from the face sides by a PTFE ring of the upper cell part, so that a circular area of the face side of the sample, 3-20 mm in diameter, is in contact with anodizing solution while the back wafer side is fully isolated from the treatment. AutoCAD-made drawings of cell's parts and assembly drawings of the whole device are available.

electrolytic processes, experimental equipment, anodization

electrolytic processes, experimental equipment, anodization

LabSensNano, room 0.65

výsledek využívá pouze poskytovatel

Využití výsledku jiným subjektem je možné bez nabytí licence (výsledek není licencován)

http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx