Detail publikačního výsledku

Accumulator Mass Structure Observation in ESEM

HAMAN, M., JIRÁK, J., ŠPINKA, J.

Originální název

Accumulator Mass Structure Observation in ESEM

Anglický název

Accumulator Mass Structure Observation in ESEM

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The work deals with problems of accumulator mass structure observation by means of scintillation and ionization detector in Environmental Scanning Electron Microscope (ESEM). There are presented graphs of contrast dependence on pressure and distance of a sample from the detector. There is indicated dependence of signal on operating conditions of the microscope from both types of detectors.

Anglický abstrakt

The work deals with problems of accumulator mass structure observation by means of scintillation and ionization detector in Environmental Scanning Electron Microscope (ESEM). There are presented graphs of contrast dependence on pressure and distance of a sample from the detector. There is indicated dependence of signal on operating conditions of the microscope from both types of detectors.

Klíčová slova v angličtině

ESEM, accumulator mass structure, detection BSE and SE

Autoři

HAMAN, M., JIRÁK, J., ŠPINKA, J.

Rok RIV

2011

Vydáno

09.09.2003

Nakladatel

Ing, Zdeněk Novotný, CSc. Brno

Místo

Brno, Czech Republic

ISBN

80-214-2452-4

Kniha

Electronic devices and Systems EDS 03

Strany od

445

Strany počet

4

URL

VUT Brno

BibTex

@inproceedings{BUT8975,
  author="Miroslav {Haman} and Josef {Jirák} and Jiří {Špinka}",
  title="Accumulator Mass Structure Observation in ESEM",
  booktitle="Electronic devices and Systems EDS 03",
  year="2003",
  pages="4",
  publisher="Ing, Zdeněk Novotný, CSc. Brno",
  address="Brno, Czech Republic",
  isbn="80-214-2452-4",
  url="VUT Brno"
}