Detail publikačního výsledku

3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

NEDĚLA, V.

Originální název

3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

Anglický název

3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope.

Anglický abstrakt

This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope.

Klíčová slova

Chamber,ESEM,detector board,differential

Klíčová slova v angličtině

Chamber,ESEM,detector board,differential

Autoři

NEDĚLA, V.

Rok RIV

2011

Vydáno

16.10.2003

Místo

Plzeň

ISBN

80-7082-993-1

Kniha

Elektrotechnika a informatika 2003

Strany od

96

Strany počet

4

BibTex

@inproceedings{BUT8969,
  author="Vilém {Neděla}",
  title="3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope",
  booktitle="Elektrotechnika a informatika 2003",
  year="2003",
  number="1",
  pages="4",
  address="Plzeň",
  isbn="80-7082-993-1"
}