Detail publikačního výsledku

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

VÁLEK, L.; ŠIK, J.

Originální název

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

Anglický název

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

Druh

Kapitola, resp. kapitoly v odborné knize

Originální abstrakt

The chapter on the growth of single crystals of Czochralski silicon and formation and control of crystal defects in silicon. The book deals with bulk crystal growth and thin film preparation.

Anglický abstrakt

The chapter on the growth of single crystals of Czochralski silicon and formation and control of crystal defects in silicon. The book deals with bulk crystal growth and thin film preparation.

Klíčová slova

silicon; single crystal; defects

Klíčová slova v angličtině

silicon; single crystal; defects

Autoři

VÁLEK, L.; ŠIK, J.

Rok RIV

2013

Vydáno

13.01.2012

Nakladatel

INTECH

Místo

Rieka, Croatia

ISBN

978-953-307-610-2

Kniha

Modern Aspects of Bulk Crystal and Thin Film Preparation

Edice

1

Strany od

43

Strany do

70

Strany počet

28

BibTex

@inbook{BUT89045,
  author="Lukáš {Válek} and Jan {Šik}",
  title="Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing",
  booktitle="Modern Aspects of Bulk Crystal and Thin Film Preparation",
  year="2012",
  publisher="INTECH",
  address="Rieka, Croatia",
  series="1",
  edition="1",
  pages="43--70",
  isbn="978-953-307-610-2"
}