Detail publikačního výsledku

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

LÉTAL, P., TOMÁNEK, P., GRMELA, L.

Originální název

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

Anglický název

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Near-field optical spectroscopy is an excellent tool to the nondesctructive inspection of the semiconductor interfaces. Its supperresolution is much better than that of the classical optical microscope.

Anglický abstrakt

Near-field optical spectroscopy is an excellent tool to the nondesctructive inspection of the semiconductor interfaces. Its supperresolution is much better than that of the classical optical microscope.

Klíčová slova

near-field optics, local spectroscopy, semiconductor, interface

Klíčová slova v angličtině

near-field optics, local spectroscopy, semiconductor, interface

Autoři

LÉTAL, P., TOMÁNEK, P., GRMELA, L.

Vydáno

19.10.2000

Místo

Trnava

ISBN

80-227-1413-5

Kniha

8th CO-MAT-TECH 2000

Strany od

141

Strany počet

6

BibTex

@inproceedings{BUT7997,
  author="Petr {Létal} and Pavel {Tománek} and Lubomír {Grmela}",
  title="Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces",
  booktitle="8th CO-MAT-TECH 2000",
  year="2000",
  pages="6",
  address="Trnava",
  isbn="80-227-1413-5"
}