Detail publikačního výsledku

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

NEDĚLA, V.

Originální název

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

Anglický název

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.

Anglický abstrakt

This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.

Klíčová slova

ESEM,DIFFERENTIAL PUMPING CHAMBER, ADAPTATION

Klíčová slova v angličtině

ESEM,DIFFERENTIAL PUMPING CHAMBER, ADAPTATION

Autoři

NEDĚLA, V.

Vydáno

01.01.2003

Místo

Brno

ISBN

80-214-2401-X

Kniha

Proceedings of the International Conference and Competition Student EEICT 2003

Strany od

199

Strany počet

5

URL

VUT Brno

BibTex

@inproceedings{BUT7908,
  author="Vilém {Neděla}",
  title="Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure",
  booktitle="Proceedings of the International Conference and Competition Student EEICT 2003",
  year="2003",
  pages="5",
  address="Brno",
  isbn="80-214-2401-X",
  url="VUT Brno"
}