Detail publikačního výsledku

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

NEDĚLA, V.; KONVALINA, I.; LENCOVÁ, B.; ZLÁMAL, J.

Originální název

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Anglický název

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Anglický abstrakt

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Klíčová slova

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

Klíčová slova v angličtině

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

Autoři

NEDĚLA, V.; KONVALINA, I.; LENCOVÁ, B.; ZLÁMAL, J.

Rok RIV

2012

Vydáno

21.07.2011

ISSN

0168-9002

Periodikum

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Svazek

645

Číslo

1

Stát

Nizozemsko

Strany od

79

Strany do

83

Strany počet

5

BibTex

@article{BUT72697,
  author="Vilém {Neděla} and Ivo {Konvalina} and Bohumila {Lencová} and Jakub {Zlámal}",
  title="Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM",
  journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT",
  year="2011",
  volume="645",
  number="1",
  pages="79--83",
  issn="0168-9002"
}