Detail publikačního výsledku

Two axis micropositioning system with piezoelectric actuators and digital control

MIKEL, B., ČÍP, O., HARNA, Z.

Originální název

Two axis micropositioning system with piezoelectric actuators and digital control

Anglický název

Two axis micropositioning system with piezoelectric actuators and digital control

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.

Anglický abstrakt

The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.

Klíčová slova

Micropositioning, PID controller, interferometry measurements.

Klíčová slova v angličtině

Micropositioning, PID controller, interferometry measurements.

Autoři

MIKEL, B., ČÍP, O., HARNA, Z.

Vydáno

01.01.2001

Nakladatel

SPIE

Místo

USA

ISBN

0-8194-4047-7

Kniha

12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics

Strany od

333

Strany počet

6

BibTex

@inproceedings{BUT6769,
  author="Břetislav {Mikel} and Ondřej {Číp} and Zdeněk {Harna}",
  title="Two axis micropositioning system with piezoelectric actuators and digital control",
  booktitle="12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics",
  year="2001",
  number="1",
  pages="6",
  publisher="SPIE",
  address="USA",
  isbn="0-8194-4047-7"
}