Detail publikačního výsledku

Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes

KNÁPEK, A.; GRMELA, L.

Originální název

Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes

Anglický název

Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes

Druh

Konferenční sborník (ne stať)

Originální abstrakt

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper. Noise diagnostics has been performed on the cathode, under the ultra high vacuum conditions (UHV) in order to provide basic analysis of manufactured cathodes. The noise spectroscopy in time and frequency domain is one of the promising methods to provide a non-destructive characterization of charge transport in used cathode.

Anglický abstrakt

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper. Noise diagnostics has been performed on the cathode, under the ultra high vacuum conditions (UHV) in order to provide basic analysis of manufactured cathodes. The noise spectroscopy in time and frequency domain is one of the promising methods to provide a non-destructive characterization of charge transport in used cathode.

Klíčová slova

Schottky cathode, nanotip cathodes, electrochemical etching

Klíčová slova v angličtině

Schottky cathode, nanotip cathodes, electrochemical etching

Autoři

KNÁPEK, A.; GRMELA, L.

Rok RIV

2010

Vydáno

04.10.2009

Nakladatel

National and Kapodistrian University of Athens

Kniha

Book of Abstracts, IMA 2009 Conference, Athens, October 2009.

Strany od

53

Strany do

53

BibTex

@proceedings{BUT65751,
  editor="Alexandr {Knápek} and Lubomír {Grmela}",
  title="Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes",
  year="2009",
  pages="53--53",
  publisher="National and Kapodistrian University of Athens"
}