Detail publikačního výsledku

Anisotropic film construction using plasma nanotechnology (atomic polymerization)

HOFEREK, L.; TRIVEDI, R.; MISTRÍK, J.; ČECH, V.

Originální název

Anisotropic film construction using plasma nanotechnology (atomic polymerization)

Anglický název

Anisotropic film construction using plasma nanotechnology (atomic polymerization)

Druh

Abstrakt

Originální abstrakt

Bilayers consisting of a-SiC:H and a-SiOC:H alloys were deposited on silicon wafer using plasma-enhanced chemical vapor deposition (PECVD). The layered structures were subjected to ellipsometric measurements that enabled us to distinguish individual layers and determine the layer thickness and its optical constants. In next study, single layer and multilayered a-SiC:H films, deposited from tetravinylsilane at different powers by PECVD, were investigated intensively by spectroscopic ellipsometry, nanoindentation, and atomic force microscopy (AFM) to compare optical and mechanical properties of the individual layer of decreased thickness (315 - 25 nm) with those of the corresponding single layer.

Anglický abstrakt

Bilayers consisting of a-SiC:H and a-SiOC:H alloys were deposited on silicon wafer using plasma-enhanced chemical vapor deposition (PECVD). The layered structures were subjected to ellipsometric measurements that enabled us to distinguish individual layers and determine the layer thickness and its optical constants. In next study, single layer and multilayered a-SiC:H films, deposited from tetravinylsilane at different powers by PECVD, were investigated intensively by spectroscopic ellipsometry, nanoindentation, and atomic force microscopy (AFM) to compare optical and mechanical properties of the individual layer of decreased thickness (315 - 25 nm) with those of the corresponding single layer.

Klíčová slova

plasma polymerization, thin films

Klíčová slova v angličtině

plasma polymerization, thin films

Autoři

HOFEREK, L.; TRIVEDI, R.; MISTRÍK, J.; ČECH, V.

Rok RIV

2011

Vydáno

27.12.2010

Kniha

IC-Plants 2010

Strany od

1

Strany do

2

Strany počet

2

BibTex

@misc{BUT60975,
  author="Lukáš {Hoferek} and Rutul Rajendra {Trivedi} and Jan {Mistrík} and Vladimír {Čech}",
  title="Anisotropic film construction using plasma nanotechnology (atomic polymerization)",
  booktitle="IC-Plants 2010",
  year="2010",
  edition="1",
  pages="1--2",
  note="Abstract"
}