Detail publikačního výsledku

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

BARTOŠÍK, M.; KOLÍBAL, M.; ČECHAL, J.; MACH, J.; ŠIKOLA, T.

Originální název

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

Anglický název

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Anglický abstrakt

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Klíčová slova

Selective growth; Local anodic oxidation; Gallium; Patterning

Klíčová slova v angličtině

Selective growth; Local anodic oxidation; Gallium; Patterning

Autoři

BARTOŠÍK, M.; KOLÍBAL, M.; ČECHAL, J.; MACH, J.; ŠIKOLA, T.

Rok RIV

2010

Vydáno

01.10.2009

ISSN

1533-4880

Periodikum

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Svazek

9

Číslo

10

Stát

Spojené státy americké

Strany od

5887

Strany do

5890

Strany počet

4

BibTex

@article{BUT48787,
  author="Miroslav {Bartošík} and Miroslav {Kolíbal} and Jan {Čechal} and Jindřich {Mach} and Tomáš {Šikola}",
  title="Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation",
  journal="JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY",
  year="2009",
  volume="9",
  number="10",
  pages="5887--5890",
  issn="1533-4880"
}