Detail publikačního výsledku

Detection of signal electrons at higher pressure in the specimen chamber

JIRÁK, J., AUTRATA, R., ŠPINKA, J.

Originální název

Detection of signal electrons at higher pressure in the specimen chamber

Anglický název

Detection of signal electrons at higher pressure in the specimen chamber

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Scintillation and ionization detectors for the detection of signals at higher pressure in the specimen chamber of the scanning electron microscope. While the signal detected by the scintillation detector decreases with the growing pressure,for ionization detector the maximum of the signal amplification by the impact ionization in gaseous environment at a certain value of pressure is typical. This value can be influencedby the choice of the working conditions as well as the gaseous environment used.

Anglický abstrakt

Scintillation and ionization detectors for the detection of signals at higher pressure in the specimen chamber of the scanning electron microscope. While the signal detected by the scintillation detector decreases with the growing pressure,for ionization detector the maximum of the signal amplification by the impact ionization in gaseous environment at a certain value of pressure is typical. This value can be influencedby the choice of the working conditions as well as the gaseous environment used.

Klíčová slova

Scanning electron microscopy at higher pressure in the specimen chamber, detection of SEs, detection of BSEs, ionization detector, scintillation detector

Klíčová slova v angličtině

Scanning electron microscopy at higher pressure in the specimen chamber, detection of SEs, detection of BSEs, ionization detector, scintillation detector

Autoři

JIRÁK, J., AUTRATA, R., ŠPINKA, J.

Vydáno

08.07.2002

Nakladatel

Institute of Scientific Instruments,Academy of Sciences of the Czech Republic Czechoslovak Microscopy Society

Místo

Brno

ISBN

80-238-8986-9

Kniha

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Strany od

55

Strany počet

2

BibTex

@inproceedings{BUT4820,
  author="Josef {Jirák} and Rudolf {Autrata} and Jiří {Špinka}",
  title="Detection of signal electrons at higher pressure in the specimen chamber",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2002",
  number="1",
  pages="2",
  publisher="Institute of Scientific Instruments,Academy of Sciences of the Czech Republic
Czechoslovak Microscopy Society",
  address="Brno",
  isbn="80-238-8986-9"
}