Detail publikačního výsledku

A new tool for the post-process modification of chips by nanostructures for chemical sensing

HUBÁLEK, J.; HRDÝ, R.; VOROZHTSOVA, M.

Originální název

A new tool for the post-process modification of chips by nanostructures for chemical sensing

Anglický název

A new tool for the post-process modification of chips by nanostructures for chemical sensing

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology.

Anglický abstrakt

The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology.

Klíčová slova

chemical sensors, nanostructured electrodes, electrochemical deposition, etching

Klíčová slova v angličtině

chemical sensors, nanostructured electrodes, electrochemical deposition, etching

Autoři

HUBÁLEK, J.; HRDÝ, R.; VOROZHTSOVA, M.

Rok RIV

2010

Vydáno

06.09.2009

Nakladatel

Elsevier BV

Místo

Lausanne, Switzerland

ISSN

1876-6196

Periodikum

Eurosensors XXIII: Sensors, Actuators and Micro/Nanosystems

Svazek

1

Číslo

1

Stát

Švýcarská konfederace

Strany od

36

Strany do

39

Strany počet

4

BibTex

@article{BUT47622,
  author="Jaromír {Hubálek} and Radim {Hrdý} and Marina {Macháčková}",
  title="A new tool for the post-process modification of chips by nanostructures for chemical sensing",
  journal="Eurosensors XXIII: Sensors, Actuators and Micro/Nanosystems",
  year="2009",
  volume="1",
  number="1",
  pages="36--39",
  issn="1876-6196"
}