Detail publikačního výsledku

Surface profilometry by a holographic confocal microscopy

CHMELÍK, R., LOVICAR, L., HARNA, Z.

Originální název

Surface profilometry by a holographic confocal microscopy

Anglický název

Surface profilometry by a holographic confocal microscopy

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

Confocal imaging by a holographic confocal microscope is based on the real-time incoherent holography. Besides the image amplitude, the image phase is inherently reconstructed. In this paper, we demonstrate that the phase image component can be converted into the height map of the specimen surface, and, in this way, we can measure the surface profile with the precision of several nanometers. The possible ambiguity in the height determination of large height steps is overcome owing to the depth discrimination property of the microscope. The axial resolution required for this purpose is achieved using broadband illumination.

Anglický abstrakt

Confocal imaging by a holographic confocal microscope is based on the real-time incoherent holography. Besides the image amplitude, the image phase is inherently reconstructed. In this paper, we demonstrate that the phase image component can be converted into the height map of the specimen surface, and, in this way, we can measure the surface profile with the precision of several nanometers. The possible ambiguity in the height determination of large height steps is overcome owing to the depth discrimination property of the microscope. The axial resolution required for this purpose is achieved using broadband illumination.

Klíčová slova

holography applications; profilometry; confocal microscopy.

Klíčová slova v angličtině

holography applications; profilometry; confocal microscopy.

Autoři

CHMELÍK, R., LOVICAR, L., HARNA, Z.

Rok RIV

2011

Vydáno

01.01.2003

ISSN

0078-5466

Periodikum

OPTICA APPLICATA

Svazek

33

Číslo

2-3

Stát

Polská republika

Strany od

381

Strany počet

9

BibTex

@article{BUT41935,
  author="Radim {Chmelík} and Luděk {Lovicar} and Zdeněk {Harna}",
  title="Surface profilometry by a holographic confocal microscopy",
  journal="OPTICA APPLICATA",
  year="2003",
  volume="33",
  number="2-3",
  pages="9",
  issn="0078-5466"
}