Detail publikačního výsledku

Ellipsometry - a tool for surface and thin film analysis

TICHOPÁDEK, P., NEBOJSA, A., ČECHAL, J.

Originální název

Ellipsometry - a tool for surface and thin film analysis

Anglický název

Ellipsometry - a tool for surface and thin film analysis

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

To study optical properties of solid surfaces under high temperatures we have designed an UHV apparatus consisting of an analytical chamber and a load chamber. The analytical chamber is pumped down by an ion pump to an ultimate background pressure of 10-7–10-8 Pa. Inside the chamber there is a manipulator carrying the substrate holder and oven designed for sample heating up to 1000C. The ellipsometer setup (angle of incidence is 67.5°) is fixed to two windows of the chamber. The paper deals with a basic description of theory, design and testing of a spectroscopic ellipsometer with the light halogen source in a wavelength interval of 350-750 nm and a simple fiber optical spectrometer with a diode array as a detector (Ocean Optics S 2000).

Anglický abstrakt

To study optical properties of solid surfaces under high temperatures we have designed an UHV apparatus consisting of an analytical chamber and a load chamber. The analytical chamber is pumped down by an ion pump to an ultimate background pressure of 10-7–10-8 Pa. Inside the chamber there is a manipulator carrying the substrate holder and oven designed for sample heating up to 1000C. The ellipsometer setup (angle of incidence is 67.5°) is fixed to two windows of the chamber. The paper deals with a basic description of theory, design and testing of a spectroscopic ellipsometer with the light halogen source in a wavelength interval of 350-750 nm and a simple fiber optical spectrometer with a diode array as a detector (Ocean Optics S 2000).

Klíčová slova v angličtině

Ellipsometry, spectroscopic ellipsometry

Autoři

TICHOPÁDEK, P., NEBOJSA, A., ČECHAL, J.

Vydáno

19.09.2001

Nakladatel

Fakulta strojního inženýrství VUT v Brně

Místo

Brno

Kniha

Juniormat '01 sborník

Strany od

102

Strany počet

4

BibTex

@inproceedings{BUT3355,
  author="Petr {Tichopádek} and Alois {Nebojsa} and Jan {Čechal}",
  title="Ellipsometry - a tool for surface and thin film analysis",
  booktitle="Juniormat '01 sborník",
  year="2001",
  pages="4",
  publisher="Fakulta strojního inženýrství VUT v Brně",
  address="Brno"
}