Detail publikačního výsledku

A simplified local surface photoreflectance measurement

BENEŠOVÁ, M., TOMÁNEK, P., DOBIS, P., GRMELA, L.

Originální název

A simplified local surface photoreflectance measurement

Anglický název

A simplified local surface photoreflectance measurement

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.

Anglický abstrakt

A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.

Klíčová slova

Reflectance, laser reflectivity, material surface characterization, optical near field, near-field scanning optical microscopy.

Klíčová slova v angličtině

Reflectance, laser reflectivity, material surface characterization, optical near field, near-field scanning optical microscopy.

Autoři

BENEŠOVÁ, M., TOMÁNEK, P., DOBIS, P., GRMELA, L.

Vydáno

27.06.2001

Nakladatel

VUTIUM

Místo

Brno

ISBN

80-214-1892-3

Kniha

Proceedings of Materials structure and micromechanics fracture

Strany od

439

Strany počet

6

BibTex

@inproceedings{BUT3348,
  author="Markéta {Benešová} and Pavel {Tománek} and Pavel {Dobis} and Lubomír {Grmela}",
  title="A simplified local surface photoreflectance measurement",
  booktitle="Proceedings of Materials structure and micromechanics fracture",
  year="2001",
  pages="6",
  publisher="VUTIUM",
  address="Brno",
  isbn="80-214-1892-3"
}