Detail publikačního výsledku

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

KADLEC, J.; JELÍNEK, M.; KOCOUREK, T.; DVOŘÁK, M.; JOSKA, Z.

Originální název

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

Anglický název

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Hybrid laser-magnetron deposition systéme was developed and tested for study carbon based thin films. Films were fabricated in argon (TiC) and in argon/nitrogen (TiCN). Crystaline films were grown at room substrate temperature. Film properties were studied by SEM, XRD, XPS and GDOES

Anglický abstrakt

Hybrid laser-magnetron deposition systéme was developed and tested for study carbon based thin films. Films were fabricated in argon (TiC) and in argon/nitrogen (TiCN). Crystaline films were grown at room substrate temperature. Film properties were studied by SEM, XRD, XPS and GDOES

Klíčová slova

Hybrid deposicion, structure properties, TiC-TiCN films

Klíčová slova v angličtině

Hybrid deposicion, structure properties, TiC-TiCN films

Autoři

KADLEC, J.; JELÍNEK, M.; KOCOUREK, T.; DVOŘÁK, M.; JOSKA, Z.

Rok RIV

2010

Vydáno

30.06.2008

Nakladatel

Brno University of Technology

Místo

Brno

ISBN

978-80-214-3659-6

Kniha

9th ABA

Edice

1

Strany od

32

Strany do

36

Strany počet

5

BibTex

@inproceedings{BUT32392,
  author="Jaromír {Kadlec} and Miroslav {Jelínek} and Tomáš {Kocourek} and Milan {Dvořák} and Zdeněk {Joska}",
  title="Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films",
  booktitle="9th ABA",
  year="2008",
  series="1",
  number="1",
  pages="32--36",
  publisher="Brno University of Technology",
  address="Brno",
  isbn="978-80-214-3659-6"
}