Detail publikace

Fabrication and Noise Diagnostics of Schottky Cathodes

KNÁPEK, A.

Originální název

Fabrication and Noise Diagnostics of Schottky Cathodes

Anglický název

Fabrication and Noise Diagnostics of Schottky Cathodes

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

čeština

Originální abstrakt

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper

Anglický abstrakt

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper

Klíčová slova

schottky emission, schottky cathodes, electrochemical etching

Klíčová slova v angličtině

schottky emission, schottky cathodes, electrochemical etching

Autoři

KNÁPEK, A.

Rok RIV

2009

Vydáno

23. 4. 2009

Nakladatel

NOVPRESS

Místo

nám. Republiky 15, 614 00, Brno,

ISBN

978-80-214-3870-5

Kniha

Proceedings of the 15th Conference, Student EEICT 2009, Volume 3

Strany od

142

Strany do

146

Strany počet

5

BibTex

@inproceedings{BUT31380,
  author="Alexandr {Knápek}",
  title="Fabrication and Noise Diagnostics of Schottky Cathodes",
  booktitle="Proceedings of the 15th Conference, Student EEICT 2009, Volume 3",
  year="2009",
  pages="142--146",
  publisher="NOVPRESS",
  address="nám. Republiky 15, 614 00, Brno,",
  isbn="978-80-214-3870-5"
}