Detail publikačního výsledku

Mechanical properties of plasma polymer films

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.

Originální název

Mechanical properties of plasma polymer films

Anglický název

Mechanical properties of plasma polymer films

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Plasma polymer films were deposited from vinyltriethoxysilane monomer on polished silicon wafers at selected deposition conditions using pulsed plasma (PECVD). Nanoindentation measurements were carried out in order to analyze selected mechanical properties of deposited films. Depth profile of the Young's modulus was discussed with respect to ellipsometric data, surface morphology measured by AFM, and chemical analyses.

Anglický abstrakt

Plasma polymer films were deposited from vinyltriethoxysilane monomer on polished silicon wafers at selected deposition conditions using pulsed plasma (PECVD). Nanoindentation measurements were carried out in order to analyze selected mechanical properties of deposited films. Depth profile of the Young's modulus was discussed with respect to ellipsometric data, surface morphology measured by AFM, and chemical analyses.

Klíčová slova

mechanical properties

Klíčová slova v angličtině

mechanical properties

Autoři

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.

Vydáno

13.12.2007

Kniha

Lokální mechanické vlastnosti

Strany od

1

Strany do

5

Strany počet

5

BibTex

@inproceedings{BUT28342,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Jan {Mistrík} and Josef {Zemek}",
  title="Mechanical properties of plasma polymer films",
  booktitle="Lokální mechanické vlastnosti",
  year="2007",
  pages="1--5"
}