Detail publikačního výsledku

Carbon Nanotubes Applicated in Pressure Measurement

FICEK, R.; VRBA, R.

Originální název

Carbon Nanotubes Applicated in Pressure Measurement

Anglický název

Carbon Nanotubes Applicated in Pressure Measurement

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Anglický abstrakt

Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Klíčová slova

Carbon Nanotubes, Sensor, MEMS

Klíčová slova v angličtině

Carbon Nanotubes, Sensor, MEMS

Autoři

FICEK, R.; VRBA, R.

Vydáno

26.04.2007

Nakladatel

Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií

Místo

Brno

ISBN

978-80-214-3410-3

Kniha

Proceedings of the 13th Conference STUDENT EEICT 2007

Strany od

295

Strany počet

4

BibTex

@inproceedings{BUT23640,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Carbon Nanotubes Applicated in Pressure Measurement",
  booktitle="Proceedings of the 13th Conference STUDENT EEICT 2007",
  year="2007",
  number="první",
  pages="4",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií",
  address="Brno",
  isbn="978-80-214-3410-3"
}