Highly efficient thermo-optic phase shifters for UV photonic applications

Highly efficient thermo-optic phase shifters for UV photonic applications

Článek WoS

We propose highly efficient, thermo-optic phase shifters based on aluminum oxide waveguides operating at UV wavelengths. The phase shifters are integrated into Mach-Zehnder interferometers for device characterization. The photonic waveguides are fabricated in a 200 mm CMOS pilot line, and heaters and silicon undercut are defined on the die-level with metal lift-off and dry etching processes. We experimentally demonstrate a phase shifter with an efficiency of 0.85 mW for a π phase shift at 360 nm wavelength. For the bandwidth characterization, we measure the 10 – 90% rise and fall times of a series of phase shifters with varying structural designs and systematically analyze the trade-off between efficiency and response time. The developed device provides a low insertion loss, high-efficiency active modulator that can be readily integrated onto the existing 200 mm aluminum oxide UV photonics platform.

We propose highly efficient, thermo-optic phase shifters based on aluminum oxide waveguides operating at UV wavelengths. The phase shifters are integrated into Mach-Zehnder interferometers for device characterization. The photonic waveguides are fabricated in a 200 mm CMOS pilot line, and heaters and silicon undercut are defined on the die-level with metal lift-off and dry etching processes. We experimentally demonstrate a phase shifter with an efficiency of 0.85 mW for a π phase shift at 360 nm wavelength. For the bandwidth characterization, we measure the 10 – 90% rise and fall times of a series of phase shifters with varying structural designs and systematically analyze the trade-off between efficiency and response time. The developed device provides a low insertion loss, high-efficiency active modulator that can be readily integrated onto the existing 200 mm aluminum oxide UV photonics platform.

ULTRAVIOLET

ULTRAVIOLET

WANG, H.; BAČOVÁ, T.; PROFT, A.; DEBAETS, M.; PHAM, N.; DORPE, P.; HAFFNER, C.; NEUTENS, P.

25.02.2026

Optica Publishing Group

OPTICS EXPRESS

34

5

Spojené státy americké

7758

7769

12

https://opg.optica.org/oe/fulltext.cfm?uri=oe-34-5-7758