Detail publikačního výsledku

A New Tool for Numerical Analysis of Signal Creation Processes in ESEM/A-ESEM

František Martínek Vilém Neděla Vladimír Tichý Adam Antálek

Originální název

A New Tool for Numerical Analysis of Signal Creation Processes in ESEM/A-ESEM

Anglický název

A New Tool for Numerical Analysis of Signal Creation Processes in ESEM/A-ESEM

Druh

Článek WoS

Originální abstrakt

A new tool for the simulation of electron-gas-sample interaction phenomena under real experimental conditions of elevated gas pressure in electron microscopes is introduced. It allows in-silico testing and optimization of detection systems of any given geometry, taking spatially variable electric field and gas flow into account. Its possibilities are demonstrated through a detailed analysis of a widely used environmental secondary detector variant (ESD-V) geometry, leading to a proposal and experimental proof of a significant increase in its secondary electron (SE) collection efficiency. In addition, suppression of the detected BSE signal, i.e., material contrast and edge effect, is demonstrated on the image of an embolized human benign tumor. The validity of the model is verified by comparison with experimental data of overall signal development in varying pressure.

Anglický abstrakt

A new tool for the simulation of electron-gas-sample interaction phenomena under real experimental conditions of elevated gas pressure in electron microscopes is introduced. It allows in-silico testing and optimization of detection systems of any given geometry, taking spatially variable electric field and gas flow into account. Its possibilities are demonstrated through a detailed analysis of a widely used environmental secondary detector variant (ESD-V) geometry, leading to a proposal and experimental proof of a significant increase in its secondary electron (SE) collection efficiency. In addition, suppression of the detected BSE signal, i.e., material contrast and edge effect, is demonstrated on the image of an embolized human benign tumor. The validity of the model is verified by comparison with experimental data of overall signal development in varying pressure.

Klíčová slova

Electrons, Detectors, Electric fields, Ionization, Geometry, Electrodes, Scanning electron microscopy, Electric potential, Trajectory, Libraries, Advanced environmental scanning electron microscopy (A-ESEM), electron microscopy, ionization detectors, Monte Carlo (MC) simulation, variable pressure scanning electron microscopy (VP-SEM), visualization

Klíčová slova v angličtině

Electrons, Detectors, Electric fields, Ionization, Geometry, Electrodes, Scanning electron microscopy, Electric potential, Trajectory, Libraries, Advanced environmental scanning electron microscopy (A-ESEM), electron microscopy, ionization detectors, Monte Carlo (MC) simulation, variable pressure scanning electron microscopy (VP-SEM), visualization

Autoři

František Martínek Vilém Neděla Vladimír Tichý Adam Antálek

Rok RIV

2026

Vydáno

01.01.2025

Periodikum

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

Číslo

74

Stát

Spojené státy americké

Strany do

10

Strany počet

10

URL

https://ieeexplore.ieee.org/document/11217191

BibTex

@article{BUT199587,
  author="František {Martínek} and Vilém {Neděla} and  {} and Adam {Antálek}",
  title="A New Tool for Numerical Analysis of Signal Creation Processes in ESEM/A-ESEM",
  journal="IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT",
  year="2025",
  number="74",
  pages="10",
  doi="10.1109/TIM.2025.3625329",
  issn="0018-9456",
  url="https://ieeexplore.ieee.org/document/11217191"
}