Detail publikace

Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases

VALLEJOS VARGAS, S. HUBÁLEK, J.

Originální název

Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases

Anglický název

Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases

Jazyk

en

Originální abstrakt

ZnO rods were grown via aerosol-assisted chemical vapor deposition on Si-based micromachined platforms. The photo- and thermo-activated sensor characteristics were evaluated towards carbon monoxide, ethanol and toluene. Results proved photo-activated response at room temperature with improved response and selectivity compared to the thermo-activated response at 250 °C. This property becomes significantly advantageous as it allows for the sensor to operate without heating.

Anglický abstrakt

ZnO rods were grown via aerosol-assisted chemical vapor deposition on Si-based micromachined platforms. The photo- and thermo-activated sensor characteristics were evaluated towards carbon monoxide, ethanol and toluene. Results proved photo-activated response at room temperature with improved response and selectivity compared to the thermo-activated response at 250 °C. This property becomes significantly advantageous as it allows for the sensor to operate without heating.

Dokumenty

BibTex


@inproceedings{BUT170141,
  author="Stella {Vallejos Vargas} and Jaromír {Hubálek}",
  title="Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases",
  annote="ZnO rods were grown via aerosol-assisted chemical vapor deposition on Si-based micromachined platforms. The photo- and thermo-activated sensor characteristics were evaluated towards carbon monoxide, ethanol and toluene. Results proved photo-activated response at room temperature with improved response and selectivity compared to the thermo-activated response at 250 °C. This property becomes significantly advantageous as it allows for the sensor to operate without heating.",
  address="Institute of Electrical and Electronics Engineers Inc",
  booktitle="2017 Spanish Conference on Electron Devices, CDE 2017",
  chapter="170141",
  doi="10.1109/CDE.2017.7905206",
  howpublished="online",
  institution="Institute of Electrical and Electronics Engineers Inc",
  year="2017",
  month="february",
  pages="1--4",
  publisher="Institute of Electrical and Electronics Engineers Inc",
  type="conference paper"
}