Detail publikačního výsledku

Design and performance of a test rig for evaluation of nanopositioning stages

YACOOT, A.; KLAPETEK, P.; VALTR, M.; GROLICH, P.; DONGMO, H.; LAZZERINI, M.; BRIDGES, A.

Originální název

Design and performance of a test rig for evaluation of nanopositioning stages

Anglický název

Design and performance of a test rig for evaluation of nanopositioning stages

Druh

Článek WoS

Originální abstrakt

Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with software, designed for traceable evaluation of stage performance. The system capabilities and performance are illustrated by measurement of stages of different levels of accuracy, including a low cost custom built stage manufactured by 3D printing. The traceability of the system is described and main uncertainty sources are discussed. Guidelines are given for the specification of stage performance.

Anglický abstrakt

Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with software, designed for traceable evaluation of stage performance. The system capabilities and performance are illustrated by measurement of stages of different levels of accuracy, including a low cost custom built stage manufactured by 3D printing. The traceability of the system is described and main uncertainty sources are discussed. Guidelines are given for the specification of stage performance.

Klíčová slova

multi-axis positioning stages; traceability; nanopositioning; dimensional metrology

Klíčová slova v angličtině

multi-axis positioning stages; traceability; nanopositioning; dimensional metrology

Autoři

YACOOT, A.; KLAPETEK, P.; VALTR, M.; GROLICH, P.; DONGMO, H.; LAZZERINI, M.; BRIDGES, A.

Rok RIV

2020

Vydáno

07.02.2019

Nakladatel

IOP PUBLISHING LTD

Místo

BRISTOL

ISSN

1361-6501

Periodikum

Measurement Science and Technology

Svazek

30

Číslo

3

Stát

Spojené království Velké Británie a Severního Irska

Strany od

1

Strany do

10

Strany počet

10

URL

https://iopscience.iop.org/article/10.1088/1361-6501/aafd03

BibTex

@article{BUT160891,
  author="Andrew {Yacoot} and Petr {Klapetek} and Miroslav {Valtr} and Petr {Grolich} and Herve {Dongmo} and Mattia {Lazzerini} and Angus {Bridges}",
  title="Design and performance of a test rig for evaluation of nanopositioning stages",
  journal="Measurement Science and Technology",
  year="2019",
  volume="30",
  number="3",
  pages="1--10",
  doi="10.1088/1361-6501/aafd03",
  issn="0957-0233",
  url="https://iopscience.iop.org/article/10.1088/1361-6501/aafd03"
}