Detail publikačního výsledku

MEMS Microhotplates for Chemical Sensors

PRÁŠEK, J.; VANČÍK, S.; SVATOŠ, V.; KLEMPA, J.; GABLECH, I.; PYTLÍČEK, Z.; LEVEK, V.

Originální název

MEMS Microhotplates for Chemical Sensors

Anglický název

MEMS Microhotplates for Chemical Sensors

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.

Anglický abstrakt

In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.

Klíčová slova

microhotplate; MEMS; micromachining; gas sensor

Klíčová slova v angličtině

microhotplate; MEMS; micromachining; gas sensor

Autoři

PRÁŠEK, J.; VANČÍK, S.; SVATOŠ, V.; KLEMPA, J.; GABLECH, I.; PYTLÍČEK, Z.; LEVEK, V.

Rok RIV

2019

Vydáno

21.08.2018

Nakladatel

IEEE Computer Society

Místo

Serbia

ISBN

9781538657317

Kniha

41st International Spring Seminar on Electronics Technology ISSE2018

ISSN

2161-2528

Periodikum

Conference proceedings (International Spring Seminar on Electronics Technology)

Svazek

2018

Stát

Spojené státy americké

Strany od

1

Strany do

5

Strany počet

5

BibTex

@inproceedings{BUT150735,
  author="Jan {Prášek} and Silvester {Vančík} and Vojtěch {Svatoš} and Jaroslav {Klempa} and Imrich {Gablech} and Zdeněk {Pytlíček} and Vladimír {Levek}",
  title="MEMS Microhotplates for Chemical Sensors",
  booktitle="41st International Spring Seminar on Electronics Technology ISSE2018",
  year="2018",
  journal="Conference proceedings (International Spring Seminar on Electronics Technology)",
  volume="2018",
  pages="1--5",
  publisher="IEEE Computer Society",
  address="Serbia",
  doi="10.1109/ISSE.2018.8443768",
  isbn="9781538657317",
  issn="2161-2528"
}