Detail publikačního výsledku

Nonlitographic Nanostructured Film Fabrication

HUBÁLEK, J.

Originální název

Nonlitographic Nanostructured Film Fabrication

Anglický název

Nonlitographic Nanostructured Film Fabrication

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Anglický abstrakt

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Klíčová slova

Self-ordering, nanopores, nanorods, nanowires

Klíčová slova v angličtině

Self-ordering, nanopores, nanorods, nanowires

Autoři

HUBÁLEK, J.

Vydáno

16.06.2004

Nakladatel

IMAPS CZ&SK chapter

Místo

Lanškroun

ISBN

80-239-2835-X

Kniha

3rd European Microelectrinics and Packaging Symposium

Svazek

první

Strany od

495

Strany počet

6

BibTex

@inproceedings{BUT11522,
  author="Jaromír {Hubálek}",
  title="Nonlitographic Nanostructured Film Fabrication",
  booktitle="3rd European Microelectrinics and Packaging Symposium",
  year="2004",
  volume="první",
  pages="6",
  publisher="IMAPS CZ&SK chapter",
  address="Lanškroun",
  isbn="80-239-2835-X"
}