Detail publikačního výsledku

Mechanical and electrical properties of evaporated thin layers

VEJMOLA, T.; YAHYA, D.; ŠANDERA, J.

Originální název

Mechanical and electrical properties of evaporated thin layers

Anglický název

Mechanical and electrical properties of evaporated thin layers

Druh

Článek recenzovaný mimo WoS a Scopus

Originální abstrakt

The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.

Anglický abstrakt

The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.

Klíčová slova

thin layers vacuum evaporation mechanical properties electrical properties electrical measurements

Klíčová slova v angličtině

thin layers vacuum evaporation mechanical properties electrical properties electrical measurements

Autoři

VEJMOLA, T.; YAHYA, D.; ŠANDERA, J.

Vydáno

05.12.2014

ISSN

1802-4564

Periodikum

ElectroScope - http://www.electroscope.zcu.cz

Svazek

2014

Číslo

3

Stát

Česká republika

Strany od

1

Strany do

4

Strany počet

4

URL

https://otik.uk.zcu.cz/bitstream/handle/11025/11824/Vejmola.pdf?sequence=1

BibTex

@article{BUT114331,
  author="Tomáš {Vejmola} and Doaa {W. F. Yahya} and Josef {Šandera}",
  title="Mechanical and electrical properties of evaporated thin layers",
  journal="ElectroScope - http://www.electroscope.zcu.cz",
  year="2014",
  volume="2014",
  number="3",
  pages="1--4",
  issn="1802-4564",
  url="https://otik.uk.zcu.cz/bitstream/handle/11025/11824/Vejmola.pdf?sequence=1"
}