Detail publikačního výsledku

Different imaging techniques for investigation of treatment effects on various substrate surfaces

CHMELA, O.; HUBÁLEK, J.

Originální název

Different imaging techniques for investigation of treatment effects on various substrate surfaces

Anglický název

Different imaging techniques for investigation of treatment effects on various substrate surfaces

Druh

Konferenční sborník (ne stať)

Originální abstrakt

The different imaging techniques were used for measurement of the properties changes on substrate surfaces. In this paper we report about testing various treatment on different sub-strates following investigation and characterization of the advantages/disadvantages of these methods for future applications. We usually used flexible materials such as polyethylene terephthalate (PET) and poly-carbonate (PC) for treatment. We also used glass substrate and aluminum oxide (Al2O3) to determine the efficiency of oxide plasma etching. As imaging techniques mainly atomic force microscopy (AFM), scanning electron microscopy (SEM), contact angle measurement and a special method for examination of layer adhesion known as a scratch test were used.

Anglický abstrakt

The different imaging techniques were used for measurement of the properties changes on substrate surfaces. In this paper we report about testing various treatment on different sub-strates following investigation and characterization of the advantages/disadvantages of these methods for future applications. We usually used flexible materials such as polyethylene terephthalate (PET) and poly-carbonate (PC) for treatment. We also used glass substrate and aluminum oxide (Al2O3) to determine the efficiency of oxide plasma etching. As imaging techniques mainly atomic force microscopy (AFM), scanning electron microscopy (SEM), contact angle measurement and a special method for examination of layer adhesion known as a scratch test were used.

Klíčová slova

substrate treatment, cleaning, AFM, oxide plasma, contact angle, SEM

Klíčová slova v angličtině

substrate treatment, cleaning, AFM, oxide plasma, contact angle, SEM

Autoři

CHMELA, O.; HUBÁLEK, J.

Rok RIV

2016

Vydáno

23.04.2015

Nakladatel

VUT v Brně, FEKT

Místo

Brno

ISBN

978-80-214-5148-3

Kniha

Proceedings of the 21st Conference STUDENT EEICT 2015

Edice

1

ISSN

NEUVEDENO

Strany od

351

Strany do

355

Strany počet

5

URL

http://www.feec.vutbr.cz/EEICT/?page_id=12

BibTex

@proceedings{BUT114292,
  editor="Ondřej {Chmela} and Jaromír {Hubálek}",
  title="Different imaging techniques for investigation of treatment effects on various substrate surfaces",
  year="2015",
  series="1",
  number="1",
  pages="351--355",
  publisher="VUT v Brně, FEKT",
  address="Brno",
  isbn="978-80-214-5148-3",
  url="http://www.feec.vutbr.cz/EEICT/?page_id=12"
}